Suppressed leakage in low temperature RTA (700°C 30S) junctions with buried epitaxial Si 1-yC y

Proceedings - Electrochemical Society

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Main Authors:	Tan, C.F., Lee, H., Liu, J.P., Quek, E., Chan, L., Chor, E.F.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/115501
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-1155012015-01-10T06:22:01Z Suppressed leakage in low temperature RTA (700°C 30S) junctions with buried epitaxial Si 1-yC y Tan, C.F. Lee, H. Liu, J.P. Quek, E. Chan, L. Chor, E.F. ELECTRICAL & COMPUTER ENGINEERING Proceedings - Electrochemical Society PV 2005-05 554-561 2014-12-12T07:16:21Z 2014-12-12T07:16:21Z 2005 Conference Paper Tan, C.F.,Lee, H.,Liu, J.P.,Quek, E.,Chan, L.,Chor, E.F. (2005). Suppressed leakage in low temperature RTA (700°C 30S) junctions with buried epitaxial Si 1-yC y. Proceedings - Electrochemical Society PV 2005-05 : 554-561. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/115501 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Proceedings - Electrochemical Society
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Tan, C.F. Lee, H. Liu, J.P. Quek, E. Chan, L. Chor, E.F.
format	Conference or Workshop Item
author	Tan, C.F. Lee, H. Liu, J.P. Quek, E. Chan, L. Chor, E.F.
spellingShingle	Tan, C.F. Lee, H. Liu, J.P. Quek, E. Chan, L. Chor, E.F. Suppressed leakage in low temperature RTA (700°C 30S) junctions with buried epitaxial Si 1-yC y
author_sort	Tan, C.F.
title	Suppressed leakage in low temperature RTA (700°C 30S) junctions with buried epitaxial Si 1-yC y
title_short	Suppressed leakage in low temperature RTA (700°C 30S) junctions with buried epitaxial Si 1-yC y
title_full	Suppressed leakage in low temperature RTA (700°C 30S) junctions with buried epitaxial Si 1-yC y
title_fullStr	Suppressed leakage in low temperature RTA (700°C 30S) junctions with buried epitaxial Si 1-yC y
title_full_unstemmed	Suppressed leakage in low temperature RTA (700°C 30S) junctions with buried epitaxial Si 1-yC y
title_sort	suppressed leakage in low temperature rta (700°c 30s) junctions with buried epitaxial si 1-yc y
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/115501
_version_	1681094996963360768

Suppressed leakage in low temperature RTA (700°C 30S) junctions with buried epitaxial Si 1-yC y

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