Characterization of delta-doped B/Si multilayers by low-energy secondary ion mass spectrometry

Characterization of delta-doped B/Si multilayers by low-energy secondary ion mass spectrometry

Surface and Interface Analysis

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Bibliographic Details
Main Authors: Liu, R., Wee, A.T.S., Shen, D.H., Takenaka, H.
Other Authors: INSTITUTE OF ENGINEERING SCIENCE
Format: Article
Published: 2014
Subjects:
B
Delta layers
Si
SIMS
Online Access:http://scholarbank.nus.edu.sg/handle/10635/116251
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Institution: National University of Singapore
Description
Summary:Surface and Interface Analysis

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