Characterization of delta-doped B/Si multilayers by low-energy secondary ion mass spectrometry
Surface and Interface Analysis
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sg-nus-scholar.10635-1162512024-11-12T21:17:54Z Characterization of delta-doped B/Si multilayers by low-energy secondary ion mass spectrometry Liu, R. Wee, A.T.S. Shen, D.H. Takenaka, H. INSTITUTE OF ENGINEERING SCIENCE PHYSICS B Delta layers Si SIMS Surface and Interface Analysis 36 2 172-176 SIAND 2014-12-12T07:47:36Z 2014-12-12T07:47:36Z 2004-02 Article Liu, R.,Wee, A.T.S.,Shen, D.H.,Takenaka, H. (2004-02). Characterization of delta-doped B/Si multilayers by low-energy secondary ion mass spectrometry. Surface and Interface Analysis 36 (2) : 172-176. ScholarBank@NUS Repository. 01422421 http://scholarbank.nus.edu.sg/handle/10635/116251 NOT_IN_WOS Scopus |
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National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
B Delta layers Si SIMS |
| spellingShingle |
B Delta layers Si SIMS Liu, R. Wee, A.T.S. Shen, D.H. Takenaka, H. Characterization of delta-doped B/Si multilayers by low-energy secondary ion mass spectrometry |
| description |
Surface and Interface Analysis |
| author2 |
INSTITUTE OF ENGINEERING SCIENCE |
| author_facet |
INSTITUTE OF ENGINEERING SCIENCE Liu, R. Wee, A.T.S. Shen, D.H. Takenaka, H. |
| format |
Article |
| author |
Liu, R. Wee, A.T.S. Shen, D.H. Takenaka, H. |
| author_sort |
Liu, R. |
| title |
Characterization of delta-doped B/Si multilayers by low-energy secondary ion mass spectrometry |
| title_short |
Characterization of delta-doped B/Si multilayers by low-energy secondary ion mass spectrometry |
| title_full |
Characterization of delta-doped B/Si multilayers by low-energy secondary ion mass spectrometry |
| title_fullStr |
Characterization of delta-doped B/Si multilayers by low-energy secondary ion mass spectrometry |
| title_full_unstemmed |
Characterization of delta-doped B/Si multilayers by low-energy secondary ion mass spectrometry |
| title_sort |
characterization of delta-doped b/si multilayers by low-energy secondary ion mass spectrometry |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/116251 |
| _version_ |
1821209907983024128 |