Proton beam written hydrogen silsesquioxane (HSQ) nanostructures for Nickel electroplating

Proton beam written hydrogen silsesquioxane (HSQ) nanostructures for Nickel electroplating

10.1016/j.nimb.2009.03.021

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Bibliographic Details
Main Authors: Gorelick, S., Zhang, F., Shao, P.G., van Kan, J.A., Whitlow, H.J., Watt, F.
Other Authors: NUS NANOSCIENCE & NANOTECH INITIATIVE
Format: Article
Published: 2014
Subjects:
Cr
High aspect ratio
Hydrogen silsesquioxane
Ni electroplating
Proton beam writing
Ti
Online Access:http://scholarbank.nus.edu.sg/handle/10635/117125
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Institution: National University of Singapore
Description
Summary:10.1016/j.nimb.2009.03.021

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