Proton beam written hydrogen silsesquioxane (HSQ) nanostructures for Nickel electroplating

Proton beam written hydrogen silsesquioxane (HSQ) nanostructures for Nickel electroplating

10.1016/j.nimb.2009.03.021

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Bibliographic Details
Main Authors: Gorelick, S., Zhang, F., Shao, P.G., van Kan, J.A., Whitlow, H.J., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
Cr
High aspect ratio
Hydrogen silsesquioxane
Ni electroplating
Proton beam writing
Ti
Online Access:http://scholarbank.nus.edu.sg/handle/10635/117125
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Institution: National University of Singapore
id sg-nus-scholar.10635-117125
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spelling sg-nus-scholar.10635-1171252024-11-14T01:01:08Z Proton beam written hydrogen silsesquioxane (HSQ) nanostructures for Nickel electroplating Gorelick, S. Zhang, F. Shao, P.G. van Kan, J.A. Whitlow, H.J. Watt, F. PHYSICS NUS NANOSCIENCE & NANOTECH INITIATIVE Cr High aspect ratio Hydrogen silsesquioxane Ni electroplating Proton beam writing Ti 10.1016/j.nimb.2009.03.021 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 267 12-13 2309-2311 NIMBE 2014-12-12T08:01:50Z 2014-12-12T08:01:50Z 2009-06-15 Article Gorelick, S., Zhang, F., Shao, P.G., van Kan, J.A., Whitlow, H.J., Watt, F. (2009-06-15). Proton beam written hydrogen silsesquioxane (HSQ) nanostructures for Nickel electroplating. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 267 (12-13) : 2309-2311. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2009.03.021 0168583X http://scholarbank.nus.edu.sg/handle/10635/117125 000267910500075 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Cr
High aspect ratio
Hydrogen silsesquioxane
Ni electroplating
Proton beam writing
Ti
spellingShingle Cr
High aspect ratio
Hydrogen silsesquioxane
Ni electroplating
Proton beam writing
Ti
Gorelick, S.
Zhang, F.
Shao, P.G.
van Kan, J.A.
Whitlow, H.J.
Watt, F.
Proton beam written hydrogen silsesquioxane (HSQ) nanostructures for Nickel electroplating
description 10.1016/j.nimb.2009.03.021
author2 PHYSICS
author_facet PHYSICS
Gorelick, S.
Zhang, F.
Shao, P.G.
van Kan, J.A.
Whitlow, H.J.
Watt, F.
format Article
author Gorelick, S.
Zhang, F.
Shao, P.G.
van Kan, J.A.
Whitlow, H.J.
Watt, F.
author_sort Gorelick, S.
title Proton beam written hydrogen silsesquioxane (HSQ) nanostructures for Nickel electroplating
title_short Proton beam written hydrogen silsesquioxane (HSQ) nanostructures for Nickel electroplating
title_full Proton beam written hydrogen silsesquioxane (HSQ) nanostructures for Nickel electroplating
title_fullStr Proton beam written hydrogen silsesquioxane (HSQ) nanostructures for Nickel electroplating
title_full_unstemmed Proton beam written hydrogen silsesquioxane (HSQ) nanostructures for Nickel electroplating
title_sort proton beam written hydrogen silsesquioxane (hsq) nanostructures for nickel electroplating
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/117125
_version_ 1821191431743602688

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