A study of the Si3N4/Cu/Ta thin film systems for dual damascene technology

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Bibliographic Details
Main Author:	YONG LAI LIN, CLARE
Other Authors:	CHEMICAL & BIOMOLECULAR ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Copper, silicon nitride, alpa/beta-tantalum, ammonia plasma treatment, electromigration, adhesion.
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/13762
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-13762
record_format	dspace
spelling	sg-nus-scholar.10635-137622015-01-12T11:08:54Z A study of the Si3N4/Cu/Ta thin film systems for dual damascene technology YONG LAI LIN, CLARE CHEMICAL & BIOMOLECULAR ENGINEERING ZENG HUA CHUN Copper, silicon nitride, alpa/beta-tantalum, ammonia plasma treatment, electromigration, adhesion. Master's MASTER OF ENGINEERING 2010-04-08T10:36:13Z 2010-04-08T10:36:13Z 2004-02-09 Thesis YONG LAI LIN, CLARE (2004-02-09). A study of the Si3N4/Cu/Ta thin film systems for dual damascene technology. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/13762 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Copper, silicon nitride, alpa/beta-tantalum, ammonia plasma treatment, electromigration, adhesion.
spellingShingle	Copper, silicon nitride, alpa/beta-tantalum, ammonia plasma treatment, electromigration, adhesion. YONG LAI LIN, CLARE A study of the Si3N4/Cu/Ta thin film systems for dual damascene technology
description	Master's
author2	CHEMICAL & BIOMOLECULAR ENGINEERING
author_facet	CHEMICAL & BIOMOLECULAR ENGINEERING YONG LAI LIN, CLARE
format	Theses and Dissertations
author	YONG LAI LIN, CLARE
author_sort	YONG LAI LIN, CLARE
title	A study of the Si3N4/Cu/Ta thin film systems for dual damascene technology
title_short	A study of the Si3N4/Cu/Ta thin film systems for dual damascene technology
title_full	A study of the Si3N4/Cu/Ta thin film systems for dual damascene technology
title_fullStr	A study of the Si3N4/Cu/Ta thin film systems for dual damascene technology
title_full_unstemmed	A study of the Si3N4/Cu/Ta thin film systems for dual damascene technology
title_sort	study of the si3n4/cu/ta thin film systems for dual damascene technology
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/13762
_version_	1681078913064763392

A study of the Si3N4/Cu/Ta thin film systems for dual damascene technology

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