A study of the Si3N4/Cu/Ta thin film systems for dual damascene technology

Master's

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Bibliographic Details
Main Author: YONG LAI LIN, CLARE
Other Authors: CHEMICAL & BIOMOLECULAR ENGINEERING
Format: Theses and Dissertations
Language:English
Published: 2010
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/13762
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Institution: National University of Singapore
Language: English

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