Microlithography: Control of temperature and resist thickness

Ph.D

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Bibliographic Details
Main Author:	LEE LAY LAY
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	lithography, model-based, real-time, feedforward, temperature, thickness
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/13786
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-13786
record_format	dspace
spelling	sg-nus-scholar.10635-137862015-01-27T08:08:19Z Microlithography: Control of temperature and resist thickness LEE LAY LAY ELECTRICAL & COMPUTER ENGINEERING HO WENG KHUEN LOH AI POH lithography, model-based, real-time, feedforward, temperature, thickness Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T10:36:27Z 2010-04-08T10:36:27Z 2004-03-06 Thesis LEE LAY LAY (2004-03-06). Microlithography: Control of temperature and resist thickness. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/13786 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	lithography, model-based, real-time, feedforward, temperature, thickness
spellingShingle	lithography, model-based, real-time, feedforward, temperature, thickness LEE LAY LAY Microlithography: Control of temperature and resist thickness
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING LEE LAY LAY
format	Theses and Dissertations
author	LEE LAY LAY
author_sort	LEE LAY LAY
title	Microlithography: Control of temperature and resist thickness
title_short	Microlithography: Control of temperature and resist thickness
title_full	Microlithography: Control of temperature and resist thickness
title_fullStr	Microlithography: Control of temperature and resist thickness
title_full_unstemmed	Microlithography: Control of temperature and resist thickness
title_sort	microlithography: control of temperature and resist thickness
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/13786
_version_	1681078917102829568

Microlithography: Control of temperature and resist thickness

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