Structural and electrical characterisations of amorphous silicon carbide films

Master's

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Main Author:	HAN LIEW JUAN
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	RF Sputtering; Annealing; FTIR; XPS; Amorphous Silicon Carbide; Interface Trapped Density.
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/14329
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-14329
record_format	dspace
spelling	sg-nus-scholar.10635-143292020-11-18T02:58:41Z Structural and electrical characterisations of amorphous silicon carbide films HAN LIEW JUAN ELECTRICAL & COMPUTER ENGINEERING CHOI WEE KIONG RF Sputtering; Annealing; FTIR; XPS; Amorphous Silicon Carbide; Interface Trapped Density. Master's MASTER OF ENGINEERING 2010-04-08T10:42:04Z 2010-04-08T10:42:04Z 2005-01-17 Thesis HAN LIEW JUAN (2005-01-17). Structural and electrical characterisations of amorphous silicon carbide films. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/14329 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	RF Sputtering; Annealing; FTIR; XPS; Amorphous Silicon Carbide; Interface Trapped Density.
spellingShingle	RF Sputtering; Annealing; FTIR; XPS; Amorphous Silicon Carbide; Interface Trapped Density. HAN LIEW JUAN Structural and electrical characterisations of amorphous silicon carbide films
description	Master's
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING HAN LIEW JUAN
format	Theses and Dissertations
author	HAN LIEW JUAN
author_sort	HAN LIEW JUAN
title	Structural and electrical characterisations of amorphous silicon carbide films
title_short	Structural and electrical characterisations of amorphous silicon carbide films
title_full	Structural and electrical characterisations of amorphous silicon carbide films
title_fullStr	Structural and electrical characterisations of amorphous silicon carbide films
title_full_unstemmed	Structural and electrical characterisations of amorphous silicon carbide films
title_sort	structural and electrical characterisations of amorphous silicon carbide films
publishDate	2010
url	https://scholarbank.nus.edu.sg/handle/10635/14329
_version_	1684664519116193792

Structural and electrical characterisations of amorphous silicon carbide films

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