Systematic investigation on the ultratrace analytical monitoring of anionic surfactants on silicon wafer surface by capillary electrophoresis using designed experiments

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Main Author:	HOO SIEOW CHENG
Other Authors:	CHEMISTRY
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Ultra-Trace, Surfactant, Silicon wafer, surface contaminants, Taguchi methodology, Optimization.
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/14819
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-14819
record_format	dspace
spelling	sg-nus-scholar.10635-148192017-10-21T05:52:13Z Systematic investigation on the ultratrace analytical monitoring of anionic surfactants on silicon wafer surface by capillary electrophoresis using designed experiments HOO SIEOW CHENG CHEMISTRY LI FONG YAU, SAM Ultra-Trace, Surfactant, Silicon wafer, surface contaminants, Taguchi methodology, Optimization. Master's MASTER OF SCIENCE 2010-04-08T10:47:09Z 2010-04-08T10:47:09Z 2005-05-25 Thesis HOO SIEOW CHENG (2005-05-25). Systematic investigation on the ultratrace analytical monitoring of anionic surfactants on silicon wafer surface by capillary electrophoresis using designed experiments. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/14819 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Ultra-Trace, Surfactant, Silicon wafer, surface contaminants, Taguchi methodology, Optimization.
spellingShingle	Ultra-Trace, Surfactant, Silicon wafer, surface contaminants, Taguchi methodology, Optimization. HOO SIEOW CHENG Systematic investigation on the ultratrace analytical monitoring of anionic surfactants on silicon wafer surface by capillary electrophoresis using designed experiments
description	Master's
author2	CHEMISTRY
author_facet	CHEMISTRY HOO SIEOW CHENG
format	Theses and Dissertations
author	HOO SIEOW CHENG
author_sort	HOO SIEOW CHENG
title	Systematic investigation on the ultratrace analytical monitoring of anionic surfactants on silicon wafer surface by capillary electrophoresis using designed experiments
title_short	Systematic investigation on the ultratrace analytical monitoring of anionic surfactants on silicon wafer surface by capillary electrophoresis using designed experiments
title_full	Systematic investigation on the ultratrace analytical monitoring of anionic surfactants on silicon wafer surface by capillary electrophoresis using designed experiments
title_fullStr	Systematic investigation on the ultratrace analytical monitoring of anionic surfactants on silicon wafer surface by capillary electrophoresis using designed experiments
title_full_unstemmed	Systematic investigation on the ultratrace analytical monitoring of anionic surfactants on silicon wafer surface by capillary electrophoresis using designed experiments
title_sort	systematic investigation on the ultratrace analytical monitoring of anionic surfactants on silicon wafer surface by capillary electrophoresis using designed experiments
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/14819
_version_	1681079090938904576

Systematic investigation on the ultratrace analytical monitoring of anionic surfactants on silicon wafer surface by capillary electrophoresis using designed experiments

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