Design and optimization of lithographic materials and processing

Ph.D

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Bibliographic Details
Main Author:	SOO CHOI PHENG
Other Authors:	MATERIALS SCIENCE
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	photoresist, lithography, photoacid diffusion, sidewall profile, etch resistance, pattern placement accuracy
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/15063
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-15063
record_format	dspace
spelling	sg-nus-scholar.10635-150632024-10-25T18:58:07Z Design and optimization of lithographic materials and processing SOO CHOI PHENG MATERIALS SCIENCE VALIYAVEETTIL, SURESH YEADON, MARK PHILPOTT, MICHAEL R photoresist, lithography, photoacid diffusion, sidewall profile, etch resistance, pattern placement accuracy Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T10:49:41Z 2010-04-08T10:49:41Z 2006-03-01 Thesis SOO CHOI PHENG (2006-03-01). Design and optimization of lithographic materials and processing. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/15063 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	photoresist, lithography, photoacid diffusion, sidewall profile, etch resistance, pattern placement accuracy
spellingShingle	photoresist, lithography, photoacid diffusion, sidewall profile, etch resistance, pattern placement accuracy SOO CHOI PHENG Design and optimization of lithographic materials and processing
description	Ph.D
author2	MATERIALS SCIENCE
author_facet	MATERIALS SCIENCE SOO CHOI PHENG
format	Theses and Dissertations
author	SOO CHOI PHENG
author_sort	SOO CHOI PHENG
title	Design and optimization of lithographic materials and processing
title_short	Design and optimization of lithographic materials and processing
title_full	Design and optimization of lithographic materials and processing
title_fullStr	Design and optimization of lithographic materials and processing
title_full_unstemmed	Design and optimization of lithographic materials and processing
title_sort	design and optimization of lithographic materials and processing
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/15063
_version_	1821230310280396800

Design and optimization of lithographic materials and processing

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