Study of Transmission Electron Microscope Sample Preparations Using Focused Ion Beam

Master's

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Bibliographic Details
Main Author:	FIDELIA TJIOE
Other Authors:	SINGAPORE-MIT ALLIANCE
Format:	Theses and Dissertations
Published:	2019
Subjects:	TEM sample FIB focused ion beam low energy cleaning low dose damage layer amorphous layer low-k material angle of incidence sample thickness
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/153886
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-153886
record_format	dspace
spelling	sg-nus-scholar.10635-1538862019-05-16T06:41:08Z Study of Transmission Electron Microscope Sample Preparations Using Focused Ion Beam FIDELIA TJIOE SINGAPORE-MIT ALLIANCE DU ANYAN LI KUN PEY KIN LEONG TEM sample FIB focused ion beam low energy cleaning low dose damage layer amorphous layer low-k material angle of incidence sample thickness Master's MASTER OF SCIENCE IN ADVANCED MATERIALS FOR MICRO- & NANO- SYSTEMS 2019-05-09T04:10:25Z 2019-05-09T04:10:25Z 2008 Thesis FIDELIA TJIOE (2008). Study of Transmission Electron Microscope Sample Preparations Using Focused Ion Beam. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/153886 SMA BATCHLOAD 20190422
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	TEM sample FIB focused ion beam low energy cleaning low dose damage layer amorphous layer low-k material angle of incidence sample thickness
spellingShingle	TEM sample FIB focused ion beam low energy cleaning low dose damage layer amorphous layer low-k material angle of incidence sample thickness FIDELIA TJIOE Study of Transmission Electron Microscope Sample Preparations Using Focused Ion Beam
description	Master's
author2	SINGAPORE-MIT ALLIANCE
author_facet	SINGAPORE-MIT ALLIANCE FIDELIA TJIOE
format	Theses and Dissertations
author	FIDELIA TJIOE
author_sort	FIDELIA TJIOE
title	Study of Transmission Electron Microscope Sample Preparations Using Focused Ion Beam
title_short	Study of Transmission Electron Microscope Sample Preparations Using Focused Ion Beam
title_full	Study of Transmission Electron Microscope Sample Preparations Using Focused Ion Beam
title_fullStr	Study of Transmission Electron Microscope Sample Preparations Using Focused Ion Beam
title_full_unstemmed	Study of Transmission Electron Microscope Sample Preparations Using Focused Ion Beam
title_sort	study of transmission electron microscope sample preparations using focused ion beam
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/153886
_version_	1681099309994475520

Study of Transmission Electron Microscope Sample Preparations Using Focused Ion Beam

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