BACKSIDE SAMPLE PREPARATION ON BULK SUBSTRATE FOR SECONDARY ION MASS SPECTROSCOPY (SIMS) ANALYSIS

Master's

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Bibliographic Details
Main Author:	ZHU JIANFENG
Other Authors:	SINGAPORE-MIT ALLIANCE
Format:	Theses and Dissertations
Published:	2019
Subjects:	backside sample preparation bulk substrate SIMS analysis depth resolution parallel lapping and polishing atomic mixing dopant profiling AFM Emission Microscope
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/153961
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Institution:	National University of Singapore

Description
Summary:	Master's

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