BACKSIDE SAMPLE PREPARATION ON BULK SUBSTRATE FOR SECONDARY ION MASS SPECTROSCOPY (SIMS) ANALYSIS

• Main Author: ZHU JIANFENG
• Other Authors: SINGAPORE-MIT ALLIANCE
• Format: Theses and Dissertations
• Published: 2019
• Subjects: backside sample preparation; bulk substrate; SIMS analysis; depth resolution; parallel lapping and polishing; atomic mixing; dopant profiling; AFM; Emission Microscope
• Online Access: https://scholarbank.nus.edu.sg/handle/10635/153961
• Institution: National University of Singapore

Master's