BACKSIDE SAMPLE PREPARATION ON BULK SUBSTRATE FOR SECONDARY ION MASS SPECTROSCOPY (SIMS) ANALYSIS

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Bibliographic Details
Main Author:	ZHU JIANFENG
Other Authors:	SINGAPORE-MIT ALLIANCE
Format:	Theses and Dissertations
Published:	2019
Subjects:	backside sample preparation bulk substrate SIMS analysis depth resolution parallel lapping and polishing atomic mixing dopant profiling AFM Emission Microscope
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/153961
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-153961
record_format	dspace
spelling	sg-nus-scholar.10635-1539612024-10-26T00:11:07Z BACKSIDE SAMPLE PREPARATION ON BULK SUBSTRATE FOR SECONDARY ION MASS SPECTROSCOPY (SIMS) ANALYSIS ZHU JIANFENG SINGAPORE-MIT ALLIANCE JOHN TL THONG HUA YOUNAN DU ANYAN backside sample preparation bulk substrate SIMS analysis depth resolution parallel lapping and polishing atomic mixing dopant profiling AFM Emission Microscope Master's MASTER OF SCIENCE IN ADVANCED MATERIALS FOR MICRO- & NANO- SYSTEMS Dissertation Supervisors: 1. Assoc. Prof. John TL Thong, SMA Fellow, NUS 2. Dr. Hua Younan, Dr. Du Anyan, GLOBALFOUNDRIES 2019-05-10T04:54:29Z 2019-05-10T04:54:29Z 2010 Thesis ZHU JIANFENG (2010). BACKSIDE SAMPLE PREPARATION ON BULK SUBSTRATE FOR SECONDARY ION MASS SPECTROSCOPY (SIMS) ANALYSIS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/153961 SMA BATCHLOAD 20190422
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	backside sample preparation bulk substrate SIMS analysis depth resolution parallel lapping and polishing atomic mixing dopant profiling AFM Emission Microscope
spellingShingle	backside sample preparation bulk substrate SIMS analysis depth resolution parallel lapping and polishing atomic mixing dopant profiling AFM Emission Microscope ZHU JIANFENG BACKSIDE SAMPLE PREPARATION ON BULK SUBSTRATE FOR SECONDARY ION MASS SPECTROSCOPY (SIMS) ANALYSIS
description	Master's
author2	SINGAPORE-MIT ALLIANCE
author_facet	SINGAPORE-MIT ALLIANCE ZHU JIANFENG
format	Theses and Dissertations
author	ZHU JIANFENG
author_sort	ZHU JIANFENG
title	BACKSIDE SAMPLE PREPARATION ON BULK SUBSTRATE FOR SECONDARY ION MASS SPECTROSCOPY (SIMS) ANALYSIS
title_short	BACKSIDE SAMPLE PREPARATION ON BULK SUBSTRATE FOR SECONDARY ION MASS SPECTROSCOPY (SIMS) ANALYSIS
title_full	BACKSIDE SAMPLE PREPARATION ON BULK SUBSTRATE FOR SECONDARY ION MASS SPECTROSCOPY (SIMS) ANALYSIS
title_fullStr	BACKSIDE SAMPLE PREPARATION ON BULK SUBSTRATE FOR SECONDARY ION MASS SPECTROSCOPY (SIMS) ANALYSIS
title_full_unstemmed	BACKSIDE SAMPLE PREPARATION ON BULK SUBSTRATE FOR SECONDARY ION MASS SPECTROSCOPY (SIMS) ANALYSIS
title_sort	backside sample preparation on bulk substrate for secondary ion mass spectroscopy (sims) analysis
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/153961
_version_	1821186548193820672

BACKSIDE SAMPLE PREPARATION ON BULK SUBSTRATE FOR SECONDARY ION MASS SPECTROSCOPY (SIMS) ANALYSIS

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