High-quality doped polycrystalline silicon using low-pressure chemical vapor deposition (LPCVD)

• Main Authors: Padhamnath, P, Nandakumar, N, Kitz, BJ, Balaji, N, Naval, MJ, Shanmugam, V, Duttagupta, S
• Other Authors: SOLAR ENERGY RESEARCH INST OF S'PORE
• Format: Conference or Workshop Item
• Published: Elsevier BV 2019
• Online Access: https://scholarbank.nus.edu.sg/handle/10635/155039
• Institution: National University of Singapore

10.1016/j.egypro.2018.09.014