Strain engineering for advanced transistor structure

Ph.D

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Bibliographic Details
Main Author:	TAN KIAN MING
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	FinFET, Strain, Diamond-Like Carbon, DLC, SiGe
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/15828
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-15828
record_format	dspace
spelling	sg-nus-scholar.10635-158282015-01-06T05:20:29Z Strain engineering for advanced transistor structure TAN KIAN MING ELECTRICAL & COMPUTER ENGINEERING YEO YEE CHIA FinFET, Strain, Diamond-Like Carbon, DLC, SiGe Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T10:57:50Z 2010-04-08T10:57:50Z 2009-05-14 Thesis TAN KIAN MING (2009-05-14). Strain engineering for advanced transistor structure. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/15828 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	FinFET, Strain, Diamond-Like Carbon, DLC, SiGe
spellingShingle	FinFET, Strain, Diamond-Like Carbon, DLC, SiGe TAN KIAN MING Strain engineering for advanced transistor structure
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING TAN KIAN MING
format	Theses and Dissertations
author	TAN KIAN MING
author_sort	TAN KIAN MING
title	Strain engineering for advanced transistor structure
title_short	Strain engineering for advanced transistor structure
title_full	Strain engineering for advanced transistor structure
title_fullStr	Strain engineering for advanced transistor structure
title_full_unstemmed	Strain engineering for advanced transistor structure
title_sort	strain engineering for advanced transistor structure
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/15828
_version_	1681079260205285376

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