CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS
Master's
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| Format: | Theses and Dissertations |
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2019
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/159092 |
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| Institution: | National University of Singapore |
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sg-nus-scholar.10635-1590922024-04-17T09:43:52Z CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS WANG CUIYANG PHYSICS SHEN ZEXIANG ZHENG JIAZHEN Master's MASTER OF SCIENCE 2019-09-16T02:51:40Z 2019-09-16T02:51:40Z 2000 Thesis WANG CUIYANG (2000). CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/159092 CCK BATCHLOAD 20190911 |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
Master's |
| author2 |
PHYSICS |
| author_facet |
PHYSICS WANG CUIYANG |
| format |
Theses and Dissertations |
| author |
WANG CUIYANG |
| spellingShingle |
WANG CUIYANG CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS |
| author_sort |
WANG CUIYANG |
| title |
CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS |
| title_short |
CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS |
| title_full |
CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS |
| title_fullStr |
CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS |
| title_full_unstemmed |
CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS |
| title_sort |
characterization of a low dielectric constant material for multilevel interconnects |
| publishDate |
2019 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/159092 |
| _version_ |
1800913755263991808 |