CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS

CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS

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Bibliographic Details
Main Author:	WANG CUIYANG
Other Authors:	PHYSICS
Format:	Theses and Dissertations
Published:	2019
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/159092
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Institution:	National University of Singapore

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