OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS
Master's
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| Format: | Theses and Dissertations |
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2019
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/160060 |
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sg-nus-scholar.10635-1600602019-10-18T05:45:49Z OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS SHIBU GANGADHARAN DEPT OF ELECTRICAL & COMPUTER ENGG CHOI WEE KIONG Master's MASTER OF ENGINEERING 2019-10-18T05:45:49Z 2019-10-18T05:45:49Z 2001 Thesis SHIBU GANGADHARAN (2001). OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/160060 CCK BATCHLOAD 20190911 |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Master's |
| author2 |
DEPT OF ELECTRICAL & COMPUTER ENGG |
| author_facet |
DEPT OF ELECTRICAL & COMPUTER ENGG SHIBU GANGADHARAN |
| format |
Theses and Dissertations |
| author |
SHIBU GANGADHARAN |
| spellingShingle |
SHIBU GANGADHARAN OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS |
| author_sort |
SHIBU GANGADHARAN |
| title |
OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS |
| title_short |
OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS |
| title_full |
OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS |
| title_fullStr |
OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS |
| title_full_unstemmed |
OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS |
| title_sort |
optical and oxidation studies of plasma enhanced chemical vapour deposited amorphous silicon carbide films |
| publishDate |
2019 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/160060 |
| _version_ |
1681100005740380160 |