OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS

Master's

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Bibliographic Details
Main Author: SHIBU GANGADHARAN
Other Authors: DEPT OF ELECTRICAL & COMPUTER ENGG
Format: Theses and Dissertations
Published: 2019
Online Access:https://scholarbank.nus.edu.sg/handle/10635/160060
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Institution: National University of Singapore