CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS
Master's
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Published: |
2019
|
| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/160406 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-160406 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-1604062019-10-18T05:55:45Z CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS WANG CUIYANG DEPT OF PHYSICS SHEN ZEXIANG ZHENG JIAZHEN Master's MASTER OF SCIENCE 2019-10-18T05:55:45Z 2019-10-18T05:55:45Z 2000 Thesis WANG CUIYANG (2000). CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/160406 CCK BATCHLOAD 20190911 |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Master's |
| author2 |
DEPT OF PHYSICS |
| author_facet |
DEPT OF PHYSICS WANG CUIYANG |
| format |
Theses and Dissertations |
| author |
WANG CUIYANG |
| spellingShingle |
WANG CUIYANG CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS |
| author_sort |
WANG CUIYANG |
| title |
CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS |
| title_short |
CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS |
| title_full |
CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS |
| title_fullStr |
CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS |
| title_full_unstemmed |
CHARACTERIZATION OF A LOW DIELECTRIC CONSTANT MATERIAL FOR MULTILEVEL INTERCONNECTS |
| title_sort |
characterization of a low dielectric constant material for multilevel interconnects |
| publishDate |
2019 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/160406 |
| _version_ |
1681100068455710720 |