Modelling and simulation of ion implantation induced damage

Ph.D

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Bibliographic Details
Main Author:	MOK KAI RINE, CAROLINE
Other Authors:	CHEMICAL & BIOMOLECULAR ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	ion implantation, damage accumulation, dynamic annealing, amorphous pockets, modeling, simulation
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/16213
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-16213
record_format	dspace
spelling	sg-nus-scholar.10635-162132015-01-05T21:33:49Z Modelling and simulation of ion implantation induced damage MOK KAI RINE, CAROLINE CHEMICAL & BIOMOLECULAR ENGINEERING SRINIVASAN, MADAPUSI P ion implantation, damage accumulation, dynamic annealing, amorphous pockets, modeling, simulation Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T11:02:15Z 2010-04-08T11:02:15Z 2007-06-06 Thesis MOK KAI RINE, CAROLINE (2007-06-06). Modelling and simulation of ion implantation induced damage. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/16213 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	ion implantation, damage accumulation, dynamic annealing, amorphous pockets, modeling, simulation
spellingShingle	ion implantation, damage accumulation, dynamic annealing, amorphous pockets, modeling, simulation MOK KAI RINE, CAROLINE Modelling and simulation of ion implantation induced damage
description	Ph.D
author2	CHEMICAL & BIOMOLECULAR ENGINEERING
author_facet	CHEMICAL & BIOMOLECULAR ENGINEERING MOK KAI RINE, CAROLINE
format	Theses and Dissertations
author	MOK KAI RINE, CAROLINE
author_sort	MOK KAI RINE, CAROLINE
title	Modelling and simulation of ion implantation induced damage
title_short	Modelling and simulation of ion implantation induced damage
title_full	Modelling and simulation of ion implantation induced damage
title_fullStr	Modelling and simulation of ion implantation induced damage
title_full_unstemmed	Modelling and simulation of ion implantation induced damage
title_sort	modelling and simulation of ion implantation induced damage
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/16213
_version_	1681079325232726016

Modelling and simulation of ion implantation induced damage

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