Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing

• Main Authors: Yang J., Luo F., Kao T.S., Li X., Ho G.W., Teng J., Luo X., Hong M.
• Other Authors: DEPT OF ELECTRICAL & COMPUTER ENGG
• Format: Article
• Published: 2020
• Subjects: Aspect ratio; Fabrication; Light reflection; Lithography; Nanowires; Optical waveguides; Optoelectronic devices; Plasmons; Reflection; Refractive index; Surface plasmon resonance; Anti reflection; broadband; Broadband anti reflections; Laser interference lithography; Light collection efficiency; Metal-assisted chemical etching; Sub-wavelength structures; Surface plasmons; Broadband; Silicon
• Online Access: https://scholarbank.nus.edu.sg/handle/10635/174580
• Institution: National University of Singapore

10.1038/lsa.2014.66