Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing

• Main Authors: Yang J., Luo F., Kao T.S., Li X., Ho G.W., Teng J., Luo X., Hong M.
• 其他作者: ELECTRICAL AND COMPUTER ENGINEERING
• 格式: Article
• 出版: 2020
• 主題: Aspect ratio; Fabrication; Light reflection; Lithography; Nanowires; Optical waveguides; Optoelectronic devices; Plasmons; Reflection; Refractive index; Surface plasmon resonance; Anti reflection; broadband; Broadband anti reflections; Laser interference lithography; Light collection efficiency; Metal-assisted chemical etching; Sub-wavelength structures; Surface plasmons; Broadband; Silicon
• 在線閱讀: https://scholarbank.nus.edu.sg/handle/10635/174580

10.1038/lsa.2014.66