Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing

Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing

10.1038/lsa.2014.66

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Bibliographic Details
Main Authors:	Yang J., Luo F., Kao T.S., Li X., Ho G.W., Teng J., Luo X., Hong M.
Other Authors:	DEPT OF ELECTRICAL & COMPUTER ENGG
Format:	Article
Published:	2020
Subjects:	Aspect ratio Fabrication Light reflection Lithography Nanowires Optical waveguides Optoelectronic devices Plasmons Reflection Refractive index Surface plasmon resonance Anti reflection broadband Broadband anti reflections Laser interference lithography Light collection efficiency Metal-assisted chemical etching Sub-wavelength structures Surface plasmons Broadband Silicon
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/174580
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Institution:	National University of Singapore

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Summary:	10.1038/lsa.2014.66