Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing

10.1038/lsa.2014.66

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Bibliographic Details
Main Authors:	Yang J., Luo F., Kao T.S., Li X., Ho G.W., Teng J., Luo X., Hong M.
Other Authors:	DEPT OF ELECTRICAL & COMPUTER ENGG
Format:	Article
Published:	2020
Subjects:	Aspect ratio Fabrication Light reflection Lithography Nanowires Optical waveguides Optoelectronic devices Plasmons Reflection Refractive index Surface plasmon resonance Anti reflection broadband Broadband anti reflections Laser interference lithography Light collection efficiency Metal-assisted chemical etching Sub-wavelength structures Surface plasmons Broadband Silicon
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/174580
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-1745802023-09-06T08:26:03Z Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing Yang J. Luo F. Kao T.S. Li X. Ho G.W. Teng J., Luo X. Hong M. DEPT OF ELECTRICAL & COMPUTER ENGG Aspect ratio Fabrication Light reflection Lithography Nanowires Optical waveguides Optoelectronic devices Plasmons Reflection Refractive index Surface plasmon resonance Anti reflection broadband Broadband anti reflections Laser interference lithography Light collection efficiency Metal-assisted chemical etching Sub-wavelength structures Surface plasmons Broadband Silicon 10.1038/lsa.2014.66 Light: Science and Applications 3 e185 2020-09-08T02:16:39Z 2020-09-08T02:16:39Z 2014 Article Yang J., Luo F., Kao T.S., Li X., Ho G.W., Teng J., Luo X., Hong M. (2014). Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing. Light: Science and Applications 3 : e185. ScholarBank@NUS Repository. https://doi.org/10.1038/lsa.2014.66 2047-7538 https://scholarbank.nus.edu.sg/handle/10635/174580 Unpaywall 20200831
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Aspect ratio Fabrication Light reflection Lithography Nanowires Optical waveguides Optoelectronic devices Plasmons Reflection Refractive index Surface plasmon resonance Anti reflection broadband Broadband anti reflections Laser interference lithography Light collection efficiency Metal-assisted chemical etching Sub-wavelength structures Surface plasmons Broadband Silicon
spellingShingle	Aspect ratio Fabrication Light reflection Lithography Nanowires Optical waveguides Optoelectronic devices Plasmons Reflection Refractive index Surface plasmon resonance Anti reflection broadband Broadband anti reflections Laser interference lithography Light collection efficiency Metal-assisted chemical etching Sub-wavelength structures Surface plasmons Broadband Silicon Yang J. Luo F. Kao T.S. Li X. Ho G.W. Teng J., Luo X. Hong M. Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing
description	10.1038/lsa.2014.66
author2	DEPT OF ELECTRICAL & COMPUTER ENGG
author_facet	DEPT OF ELECTRICAL & COMPUTER ENGG Yang J. Luo F. Kao T.S. Li X. Ho G.W. Teng J., Luo X. Hong M.
format	Article
author	Yang J. Luo F. Kao T.S. Li X. Ho G.W. Teng J., Luo X. Hong M.
author_sort	Yang J.
title	Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing
title_short	Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing
title_full	Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing
title_fullStr	Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing
title_full_unstemmed	Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing
title_sort	design and fabrication of broadband ultralow reflectivity black si surfaces by laser micro/nanoprocessing
publishDate	2020
url	https://scholarbank.nus.edu.sg/handle/10635/174580
_version_	1778169785058590720

Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing

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