Evidences for redox reaction driven charge transfer and mass transport in metal-assisted chemical etching of silicon

Evidences for redox reaction driven charge transfer and mass transport in metal-assisted chemical etching of silicon

10.1038/srep36582

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Bibliographic Details
Main Authors: Kong, L, Dasgupta, B, Ren, Y, Mohseni, P.K, Hong, M, Li, X, Chim, W.K, Chiam, S.Y
Other Authors: DEPT OF ELECTRICAL & COMPUTER ENGG
Format: Article
Published: Nature Publishing Group 2020
Online Access:https://scholarbank.nus.edu.sg/handle/10635/174921
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Institution: National University of Singapore

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https://scholarbank.nus.edu.sg/handle/10635/174921

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