Evidences for redox reaction driven charge transfer and mass transport in metal-assisted chemical etching of silicon
10.1038/srep36582
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Main Authors: | Kong, L, Dasgupta, B, Ren, Y, Mohseni, P.K, Hong, M, Li, X, Chim, W.K, Chiam, S.Y |
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Other Authors: | DEPT OF ELECTRICAL & COMPUTER ENGG |
Format: | Article |
Published: |
Nature Publishing Group
2020
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Online Access: | https://scholarbank.nus.edu.sg/handle/10635/174921 |
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Institution: | National University of Singapore |
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