Evidences for redox reaction driven charge transfer and mass transport in metal-assisted chemical etching of silicon

10.1038/srep36582

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Main Authors:	Kong, L, Dasgupta, B, Ren, Y, Mohseni, P.K, Hong, M, Li, X, Chim, W.K, Chiam, S.Y
Other Authors:	DEPT OF ELECTRICAL & COMPUTER ENGG
Format:	Article
Published:	Nature Publishing Group 2020
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/174921
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-1749212023-09-05T09:55:19Z Evidences for redox reaction driven charge transfer and mass transport in metal-assisted chemical etching of silicon Kong, L Dasgupta, B Ren, Y Mohseni, P.K Hong, M Li, X Chim, W.K Chiam, S.Y DEPT OF ELECTRICAL & COMPUTER ENGG 10.1038/srep36582 Scientific Reports 6 36582 2020-09-09T01:25:03Z 2020-09-09T01:25:03Z 2016 Article Kong, L, Dasgupta, B, Ren, Y, Mohseni, P.K, Hong, M, Li, X, Chim, W.K, Chiam, S.Y (2016). Evidences for redox reaction driven charge transfer and mass transport in metal-assisted chemical etching of silicon. Scientific Reports 6 : 36582. ScholarBank@NUS Repository. https://doi.org/10.1038/srep36582 20452322 https://scholarbank.nus.edu.sg/handle/10635/174921 Nature Publishing Group Unpaywall 20200831
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1038/srep36582
author2	DEPT OF ELECTRICAL & COMPUTER ENGG
author_facet	DEPT OF ELECTRICAL & COMPUTER ENGG Kong, L Dasgupta, B Ren, Y Mohseni, P.K Hong, M Li, X Chim, W.K Chiam, S.Y
format	Article
author	Kong, L Dasgupta, B Ren, Y Mohseni, P.K Hong, M Li, X Chim, W.K Chiam, S.Y
spellingShingle	Kong, L Dasgupta, B Ren, Y Mohseni, P.K Hong, M Li, X Chim, W.K Chiam, S.Y Evidences for redox reaction driven charge transfer and mass transport in metal-assisted chemical etching of silicon
author_sort	Kong, L
title	Evidences for redox reaction driven charge transfer and mass transport in metal-assisted chemical etching of silicon
title_short	Evidences for redox reaction driven charge transfer and mass transport in metal-assisted chemical etching of silicon
title_full	Evidences for redox reaction driven charge transfer and mass transport in metal-assisted chemical etching of silicon
title_fullStr	Evidences for redox reaction driven charge transfer and mass transport in metal-assisted chemical etching of silicon
title_full_unstemmed	Evidences for redox reaction driven charge transfer and mass transport in metal-assisted chemical etching of silicon
title_sort	evidences for redox reaction driven charge transfer and mass transport in metal-assisted chemical etching of silicon
publisher	Nature Publishing Group
publishDate	2020
url	https://scholarbank.nus.edu.sg/handle/10635/174921
_version_	1778169807477145600

Evidences for redox reaction driven charge transfer and mass transport in metal-assisted chemical etching of silicon

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