COMPARISON OF TA2O5 CAPACITORS ON SI WITH AND WITHOUT RAPID THERMAL NITRIDATION

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Main Author: ZHANG GUANGYU
Other Authors: ELECTRICAL ENGINEERING
Format: Theses and Dissertations
Published: 2020
Online Access:https://scholarbank.nus.edu.sg/handle/10635/177249
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-1772492020-11-19T13:57:16Z COMPARISON OF TA2O5 CAPACITORS ON SI WITH AND WITHOUT RAPID THERMAL NITRIDATION ZHANG GUANGYU ELECTRICAL ENGINEERING LAU WAI SHING CHONG TOW CHONG LI MINGFU Master's MASTER OF ENGINEERING 2020-10-08T07:12:29Z 2020-10-08T07:12:29Z 1999 Thesis ZHANG GUANGYU (1999). COMPARISON OF TA2O5 CAPACITORS ON SI WITH AND WITHOUT RAPID THERMAL NITRIDATION. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/177249 CCK BATCHLOAD 20201023
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description Master's
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
ZHANG GUANGYU
format Theses and Dissertations
author ZHANG GUANGYU
spellingShingle ZHANG GUANGYU
COMPARISON OF TA2O5 CAPACITORS ON SI WITH AND WITHOUT RAPID THERMAL NITRIDATION
author_sort ZHANG GUANGYU
title COMPARISON OF TA2O5 CAPACITORS ON SI WITH AND WITHOUT RAPID THERMAL NITRIDATION
title_short COMPARISON OF TA2O5 CAPACITORS ON SI WITH AND WITHOUT RAPID THERMAL NITRIDATION
title_full COMPARISON OF TA2O5 CAPACITORS ON SI WITH AND WITHOUT RAPID THERMAL NITRIDATION
title_fullStr COMPARISON OF TA2O5 CAPACITORS ON SI WITH AND WITHOUT RAPID THERMAL NITRIDATION
title_full_unstemmed COMPARISON OF TA2O5 CAPACITORS ON SI WITH AND WITHOUT RAPID THERMAL NITRIDATION
title_sort comparison of ta2o5 capacitors on si with and without rapid thermal nitridation
publishDate 2020
url https://scholarbank.nus.edu.sg/handle/10635/177249
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