COMPARISON OF TA2O5 CAPACITORS ON SI WITH AND WITHOUT RAPID THERMAL NITRIDATION
Master's
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sg-nus-scholar.10635-1772492020-11-19T13:57:16Z COMPARISON OF TA2O5 CAPACITORS ON SI WITH AND WITHOUT RAPID THERMAL NITRIDATION ZHANG GUANGYU ELECTRICAL ENGINEERING LAU WAI SHING CHONG TOW CHONG LI MINGFU Master's MASTER OF ENGINEERING 2020-10-08T07:12:29Z 2020-10-08T07:12:29Z 1999 Thesis ZHANG GUANGYU (1999). COMPARISON OF TA2O5 CAPACITORS ON SI WITH AND WITHOUT RAPID THERMAL NITRIDATION. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/177249 CCK BATCHLOAD 20201023 |
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National University of Singapore |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
description |
Master's |
author2 |
ELECTRICAL ENGINEERING |
author_facet |
ELECTRICAL ENGINEERING ZHANG GUANGYU |
format |
Theses and Dissertations |
author |
ZHANG GUANGYU |
spellingShingle |
ZHANG GUANGYU COMPARISON OF TA2O5 CAPACITORS ON SI WITH AND WITHOUT RAPID THERMAL NITRIDATION |
author_sort |
ZHANG GUANGYU |
title |
COMPARISON OF TA2O5 CAPACITORS ON SI WITH AND WITHOUT RAPID THERMAL NITRIDATION |
title_short |
COMPARISON OF TA2O5 CAPACITORS ON SI WITH AND WITHOUT RAPID THERMAL NITRIDATION |
title_full |
COMPARISON OF TA2O5 CAPACITORS ON SI WITH AND WITHOUT RAPID THERMAL NITRIDATION |
title_fullStr |
COMPARISON OF TA2O5 CAPACITORS ON SI WITH AND WITHOUT RAPID THERMAL NITRIDATION |
title_full_unstemmed |
COMPARISON OF TA2O5 CAPACITORS ON SI WITH AND WITHOUT RAPID THERMAL NITRIDATION |
title_sort |
comparison of ta2o5 capacitors on si with and without rapid thermal nitridation |
publishDate |
2020 |
url |
https://scholarbank.nus.edu.sg/handle/10635/177249 |
_version_ |
1686108943051390976 |