Transient Clustering of Reaction Intermediates during Wet Etching of Silicon Nanostructures

10.1021/acs.nanolett.7b00196

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Bibliographic Details
Main Authors:	ZAINUL AABDIN, Xiu Mei Xu, Soumyo Sen, UTKARSH ANAND, Petr Kral, Frank Holsteyns, UTKUR MIRZIYODOVICH MIRSAIDOV
Other Authors:	CENTRE FOR ADVANCED 2D MATERIALS
Format:	Article
Language:	English
Published:	Nano Letters 2020
Subjects:	Etching,Molecules,Silicon,Transmission electron microscopy,Nanoclusters
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/177680
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Institution:	National University of Singapore
Language:	English

Description
Summary:	10.1021/acs.nanolett.7b00196

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