Transient Clustering of Reaction Intermediates during Wet Etching of Silicon Nanostructures

10.1021/acs.nanolett.7b00196

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Bibliographic Details
Main Authors:	ZAINUL AABDIN, Xiu Mei Xu, Soumyo Sen, UTKARSH ANAND, Petr Kral, Frank Holsteyns, UTKUR MIRZIYODOVICH MIRSAIDOV
Other Authors:	CENTRE FOR ADVANCED 2D MATERIALS
Format:	Article
Language:	English
Published:	Nano Letters 2020
Subjects:	Etching,Molecules,Silicon,Transmission electron microscopy,Nanoclusters
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/177680
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-177680
record_format	dspace
spelling	sg-nus-scholar.10635-1776802024-04-02T08:10:48Z Transient Clustering of Reaction Intermediates during Wet Etching of Silicon Nanostructures ZAINUL AABDIN Xiu Mei Xu Soumyo Sen UTKARSH ANAND Petr Kral Frank Holsteyns UTKUR MIRZIYODOVICH MIRSAIDOV CENTRE FOR ADVANCED 2D MATERIALS BIOLOGICAL SCIENCES DEPT OF PHYSICS NUS NANOSCIENCE & NANOTECH INITIATIVE Etching,Molecules,Silicon,Transmission electron microscopy,Nanoclusters 10.1021/acs.nanolett.7b00196 Nano Letters 17 2953−2958 2020-10-16T09:25:35Z 2020-10-16T09:25:35Z 2017-04-18 Article ZAINUL AABDIN, Xiu Mei Xu, Soumyo Sen, UTKARSH ANAND, Petr Kral, Frank Holsteyns, UTKUR MIRZIYODOVICH MIRSAIDOV (2017-04-18). Transient Clustering of Reaction Intermediates during Wet Etching of Silicon Nanostructures. Nano Letters 17 : 2953−2958. ScholarBank@NUS Repository. https://doi.org/10.1021/acs.nanolett.7b00196 https://scholarbank.nus.edu.sg/handle/10635/177680 en DOI:10.1021/acs.nanolett.7b00196 CC0 1.0 Universal http://creativecommons.org/publicdomain/zero/1.0/ Nano Letters
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	Etching,Molecules,Silicon,Transmission electron microscopy,Nanoclusters
spellingShingle	Etching,Molecules,Silicon,Transmission electron microscopy,Nanoclusters ZAINUL AABDIN Xiu Mei Xu Soumyo Sen UTKARSH ANAND Petr Kral Frank Holsteyns UTKUR MIRZIYODOVICH MIRSAIDOV Transient Clustering of Reaction Intermediates during Wet Etching of Silicon Nanostructures
description	10.1021/acs.nanolett.7b00196
author2	CENTRE FOR ADVANCED 2D MATERIALS
author_facet	CENTRE FOR ADVANCED 2D MATERIALS ZAINUL AABDIN Xiu Mei Xu Soumyo Sen UTKARSH ANAND Petr Kral Frank Holsteyns UTKUR MIRZIYODOVICH MIRSAIDOV
format	Article
author	ZAINUL AABDIN Xiu Mei Xu Soumyo Sen UTKARSH ANAND Petr Kral Frank Holsteyns UTKUR MIRZIYODOVICH MIRSAIDOV
author_sort	ZAINUL AABDIN
title	Transient Clustering of Reaction Intermediates during Wet Etching of Silicon Nanostructures
title_short	Transient Clustering of Reaction Intermediates during Wet Etching of Silicon Nanostructures
title_full	Transient Clustering of Reaction Intermediates during Wet Etching of Silicon Nanostructures
title_fullStr	Transient Clustering of Reaction Intermediates during Wet Etching of Silicon Nanostructures
title_full_unstemmed	Transient Clustering of Reaction Intermediates during Wet Etching of Silicon Nanostructures
title_sort	transient clustering of reaction intermediates during wet etching of silicon nanostructures
publisher	Nano Letters
publishDate	2020
url	https://scholarbank.nus.edu.sg/handle/10635/177680
_version_	1795301195595644928

Transient Clustering of Reaction Intermediates during Wet Etching of Silicon Nanostructures

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