Transient Clustering of Reaction Intermediates during Wet Etching of Silicon Nanostructures

Transient Clustering of Reaction Intermediates during Wet Etching of Silicon Nanostructures

10.1021/acs.nanolett.7b00196

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書目詳細資料
Main Authors: ZAINUL AABDIN, Xiu Mei Xu, Soumyo Sen, UTKARSH ANAND, Petr Kral, Frank Holsteyns, UTKUR MIRZIYODOVICH MIRSAIDOV
其他作者: CENTRE FOR ADVANCED 2D MATERIALS
格式: Article
語言:English
出版: Nano Letters 2020
主題:
Etching,Molecules,Silicon,Transmission electron microscopy,Nanoclusters
在線閱讀:https://scholarbank.nus.edu.sg/handle/10635/177680
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