Enhancement of Raman signals from low-k dielectrics with angle-resolved light scattering on nanostructure patterned Cu/low-k interconnects of IC devices

10.1116/1.4905939

Saved in:

Bibliographic Details
Main Authors:	Huang, M.Y.M, Liu, B, Tan, P.K, Lam, J.C.K, Mai, Z
Other Authors:	ELECTRICAL AND COMPUTER ENGINEERING
Format:	Article
Published:	AVS Science and Technology Society 2020
Subjects:	Characterization Integrated circuit interconnects Integrated circuits Interdiffusion (solids) Light scattering Nanostructures Raman spectroscopy Semiconductor device manufacture Angle-resolved light scattering Cu/low-k interconnects Incident laser light Integrated circuit devices Low-k dielectric materials Nanometer scale structure Semiconductor technology Surface plasmon effects Dielectric materials
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/180084
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-180084
record_format	dspace
spelling	sg-nus-scholar.10635-1800842024-04-25T03:32:51Z Enhancement of Raman signals from low-k dielectrics with angle-resolved light scattering on nanostructure patterned Cu/low-k interconnects of IC devices Huang, M.Y.M Liu, B Tan, P.K Lam, J.C.K Mai, Z ELECTRICAL AND COMPUTER ENGINEERING Characterization Integrated circuit interconnects Integrated circuits Interdiffusion (solids) Light scattering Nanostructures Raman spectroscopy Semiconductor device manufacture Angle-resolved light scattering Cu/low-k interconnects Incident laser light Integrated circuit devices Low-k dielectric materials Nanometer scale structure Semiconductor technology Surface plasmon effects Dielectric materials 10.1116/1.4905939 Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 33 2 20603 2020-10-26T06:50:48Z 2020-10-26T06:50:48Z 2015 Article Huang, M.Y.M, Liu, B, Tan, P.K, Lam, J.C.K, Mai, Z (2015). Enhancement of Raman signals from low-k dielectrics with angle-resolved light scattering on nanostructure patterned Cu/low-k interconnects of IC devices. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 33 (2) : 20603. ScholarBank@NUS Repository. https://doi.org/10.1116/1.4905939 0734-2101 https://scholarbank.nus.edu.sg/handle/10635/180084 Attribution 4.0 International http://creativecommons.org/licenses/by/4.0/ AVS Science and Technology Society Unpaywall 20201031
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Characterization Integrated circuit interconnects Integrated circuits Interdiffusion (solids) Light scattering Nanostructures Raman spectroscopy Semiconductor device manufacture Angle-resolved light scattering Cu/low-k interconnects Incident laser light Integrated circuit devices Low-k dielectric materials Nanometer scale structure Semiconductor technology Surface plasmon effects Dielectric materials
spellingShingle	Characterization Integrated circuit interconnects Integrated circuits Interdiffusion (solids) Light scattering Nanostructures Raman spectroscopy Semiconductor device manufacture Angle-resolved light scattering Cu/low-k interconnects Incident laser light Integrated circuit devices Low-k dielectric materials Nanometer scale structure Semiconductor technology Surface plasmon effects Dielectric materials Huang, M.Y.M Liu, B Tan, P.K Lam, J.C.K Mai, Z Enhancement of Raman signals from low-k dielectrics with angle-resolved light scattering on nanostructure patterned Cu/low-k interconnects of IC devices
description	10.1116/1.4905939
author2	ELECTRICAL AND COMPUTER ENGINEERING
author_facet	ELECTRICAL AND COMPUTER ENGINEERING Huang, M.Y.M Liu, B Tan, P.K Lam, J.C.K Mai, Z
format	Article
author	Huang, M.Y.M Liu, B Tan, P.K Lam, J.C.K Mai, Z
author_sort	Huang, M.Y.M
title	Enhancement of Raman signals from low-k dielectrics with angle-resolved light scattering on nanostructure patterned Cu/low-k interconnects of IC devices
title_short	Enhancement of Raman signals from low-k dielectrics with angle-resolved light scattering on nanostructure patterned Cu/low-k interconnects of IC devices
title_full	Enhancement of Raman signals from low-k dielectrics with angle-resolved light scattering on nanostructure patterned Cu/low-k interconnects of IC devices
title_fullStr	Enhancement of Raman signals from low-k dielectrics with angle-resolved light scattering on nanostructure patterned Cu/low-k interconnects of IC devices
title_full_unstemmed	Enhancement of Raman signals from low-k dielectrics with angle-resolved light scattering on nanostructure patterned Cu/low-k interconnects of IC devices
title_sort	enhancement of raman signals from low-k dielectrics with angle-resolved light scattering on nanostructure patterned cu/low-k interconnects of ic devices
publisher	AVS Science and Technology Society
publishDate	2020
url	https://scholarbank.nus.edu.sg/handle/10635/180084
_version_	1800914578320654336

Enhancement of Raman signals from low-k dielectrics with angle-resolved light scattering on nanostructure patterned Cu/low-k interconnects of IC devices

Similar Items