Calibration of nanopositioning stages

Calibration of nanopositioning stages

10.3390/mi6121461

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Bibliographic Details
Main Authors: Tan, N, Clévy, C, Chaillet, N
Other Authors: BIOMEDICAL ENGINEERING
Format: Article
Published: 2020
Subjects:
Degrees of freedom (mechanics)
Error compensation
Accuracy
Geometric errors
Nano-positioning stages
Open-loop
Repeatability
Thermal compensation
Calibration
Online Access:https://scholarbank.nus.edu.sg/handle/10635/180359
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Institution: National University of Singapore

Internet

https://scholarbank.nus.edu.sg/handle/10635/180359

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