Calibration of nanopositioning stages

10.3390/mi6121461

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Bibliographic Details
Main Authors:	Tan, N, Clévy, C, Chaillet, N
Other Authors:	BIOMEDICAL ENGINEERING
Format:	Article
Published:	2020
Subjects:	Degrees of freedom (mechanics) Error compensation Accuracy Geometric errors Nano-positioning stages Open-loop Repeatability Thermal compensation Calibration
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/180359
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Institution:	National University of Singapore

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