Calibration of nanopositioning stages

Calibration of nanopositioning stages

10.3390/mi6121461

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Bibliographic Details
Main Authors: Tan, N, Clévy, C, Chaillet, N
Other Authors: BIOMEDICAL ENGINEERING
Format: Article
Published: 2020
Subjects:
Degrees of freedom (mechanics)
Error compensation
Accuracy
Geometric errors
Nano-positioning stages
Open-loop
Repeatability
Thermal compensation
Calibration
Online Access:https://scholarbank.nus.edu.sg/handle/10635/180359
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Institution: National University of Singapore
id sg-nus-scholar.10635-180359
record_format dspace
spelling sg-nus-scholar.10635-1803592024-11-11T03:51:42Z Calibration of nanopositioning stages Tan, N Clévy, C Chaillet, N BIOMEDICAL ENGINEERING Degrees of freedom (mechanics) Error compensation Accuracy Geometric errors Nano-positioning stages Open-loop Repeatability Thermal compensation Calibration 10.3390/mi6121461 Micromachines 6 12 1856-1875 2020-10-26T08:32:04Z 2020-10-26T08:32:04Z 2015 Article Tan, N, Clévy, C, Chaillet, N (2015). Calibration of nanopositioning stages. Micromachines 6 (12) : 1856-1875. ScholarBank@NUS Repository. https://doi.org/10.3390/mi6121461 2072666X https://scholarbank.nus.edu.sg/handle/10635/180359 Attribution 4.0 International http://creativecommons.org/licenses/by/4.0/ Unpaywall 20201031
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Degrees of freedom (mechanics)
Error compensation
Accuracy
Geometric errors
Nano-positioning stages
Open-loop
Repeatability
Thermal compensation
Calibration
spellingShingle Degrees of freedom (mechanics)
Error compensation
Accuracy
Geometric errors
Nano-positioning stages
Open-loop
Repeatability
Thermal compensation
Calibration
Tan, N
Clévy, C
Chaillet, N
Calibration of nanopositioning stages
description 10.3390/mi6121461
author2 BIOMEDICAL ENGINEERING
author_facet BIOMEDICAL ENGINEERING
Tan, N
Clévy, C
Chaillet, N
format Article
author Tan, N
Clévy, C
Chaillet, N
author_sort Tan, N
title Calibration of nanopositioning stages
title_short Calibration of nanopositioning stages
title_full Calibration of nanopositioning stages
title_fullStr Calibration of nanopositioning stages
title_full_unstemmed Calibration of nanopositioning stages
title_sort calibration of nanopositioning stages
publishDate 2020
url https://scholarbank.nus.edu.sg/handle/10635/180359
_version_ 1821212066742009856

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