PREPARATION AND CHARACTERISATION OF HYDROGENATED R. F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS
Master's
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2020
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/182295 |
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sg-nus-scholar.10635-1822952020-11-19T13:57:20Z PREPARATION AND CHARACTERISATION OF HYDROGENATED R. F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS LOO FOOK LEONG ELECTRICAL ENGINEERING CHOI WEE KIONG Master's MASTER OF ENGINEERING 2020-10-30T08:16:10Z 2020-10-30T08:16:10Z 1996 Thesis LOO FOOK LEONG (1996). PREPARATION AND CHARACTERISATION OF HYDROGENATED R. F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/182295 CCK BATCHLOAD 20201023 |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
Master's |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING LOO FOOK LEONG |
| format |
Theses and Dissertations |
| author |
LOO FOOK LEONG |
| spellingShingle |
LOO FOOK LEONG PREPARATION AND CHARACTERISATION OF HYDROGENATED R. F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| author_sort |
LOO FOOK LEONG |
| title |
PREPARATION AND CHARACTERISATION OF HYDROGENATED R. F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_short |
PREPARATION AND CHARACTERISATION OF HYDROGENATED R. F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_full |
PREPARATION AND CHARACTERISATION OF HYDROGENATED R. F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_fullStr |
PREPARATION AND CHARACTERISATION OF HYDROGENATED R. F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_full_unstemmed |
PREPARATION AND CHARACTERISATION OF HYDROGENATED R. F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_sort |
preparation and characterisation of hydrogenated r. f. sputtered amorphous silicon carbide films |
| publishDate |
2020 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/182295 |
| _version_ |
1686109176659443712 |