EFFECTS OF ANNEALING ON THE STRUCTURAL PROPERTIES OF R.F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS

Master's

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Bibliographic Details
Main Author: ONG TIONG YEW
Other Authors: ELECTRICAL ENGINEERING
Format: Theses and Dissertations
Published: 2020
Online Access:https://scholarbank.nus.edu.sg/handle/10635/180012
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Institution: National University of Singapore