EFFECTS OF ANNEALING ON THE STRUCTURAL PROPERTIES OF R.F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS
Master's
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| Main Author: | |
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| Other Authors: | |
| Format: | Theses and Dissertations |
| Published: |
2020
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/180012 |
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| Institution: | National University of Singapore |
| Summary: | Master's |
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