EFFECTS OF ANNEALING ON THE STRUCTURAL PROPERTIES OF R.F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS
Master's
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| Format: | Theses and Dissertations |
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2020
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/180012 |
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sg-nus-scholar.10635-1800122020-11-19T13:57:18Z EFFECTS OF ANNEALING ON THE STRUCTURAL PROPERTIES OF R.F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS ONG TIONG YEW ELECTRICAL ENGINEERING CHOI WEE KIONG TAN LENG SEOW Master's MASTER OF ENGINEERING 2020-10-26T06:32:00Z 2020-10-26T06:32:00Z 1999 Thesis ONG TIONG YEW (1999). EFFECTS OF ANNEALING ON THE STRUCTURAL PROPERTIES OF R.F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/180012 CCK BATCHLOAD 20201023 |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
Master's |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING ONG TIONG YEW |
| format |
Theses and Dissertations |
| author |
ONG TIONG YEW |
| spellingShingle |
ONG TIONG YEW EFFECTS OF ANNEALING ON THE STRUCTURAL PROPERTIES OF R.F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| author_sort |
ONG TIONG YEW |
| title |
EFFECTS OF ANNEALING ON THE STRUCTURAL PROPERTIES OF R.F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_short |
EFFECTS OF ANNEALING ON THE STRUCTURAL PROPERTIES OF R.F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_full |
EFFECTS OF ANNEALING ON THE STRUCTURAL PROPERTIES OF R.F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_fullStr |
EFFECTS OF ANNEALING ON THE STRUCTURAL PROPERTIES OF R.F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_full_unstemmed |
EFFECTS OF ANNEALING ON THE STRUCTURAL PROPERTIES OF R.F. SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_sort |
effects of annealing on the structural properties of r.f. sputtered amorphous silicon carbide films |
| publishDate |
2020 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/180012 |
| _version_ |
1686109084404678656 |