Transition from ripples to faceted structures under low-energy argon ion bombardment of silicon: Understanding the role of shadowing and sputtering
10.1186/1556-276X-8-289
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sg-nus-scholar.10635-1832172023-09-20T21:49:26Z Transition from ripples to faceted structures under low-energy argon ion bombardment of silicon: Understanding the role of shadowing and sputtering Basu, T Datta, D.P Som, T CENTRE FOR ADVANCED 2D MATERIALS Argon Atomic force microscopy Coarsening Ion beams Ostwald ripening Silicon Sputtering Surface roughness Topography Angles of incidence Faceted structures Ion beam patterning Mechanism-based Parallel mode Shadowing effects Sputtering yields Temporal evolution Ion bombardment 10.1186/1556-276X-8-289 Nanoscale Research Letters 8 1 1-8 2020-11-10T00:33:42Z 2020-11-10T00:33:42Z 2013 Article Basu, T, Datta, D.P, Som, T (2013). Transition from ripples to faceted structures under low-energy argon ion bombardment of silicon: Understanding the role of shadowing and sputtering. Nanoscale Research Letters 8 (1) : 1-8. ScholarBank@NUS Repository. https://doi.org/10.1186/1556-276X-8-289 19317573 https://scholarbank.nus.edu.sg/handle/10635/183217 Attribution 4.0 International http://creativecommons.org/licenses/by/4.0/ Unpaywall 20201031 |
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Singapore Singapore |
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Argon Atomic force microscopy Coarsening Ion beams Ostwald ripening Silicon Sputtering Surface roughness Topography Angles of incidence Faceted structures Ion beam patterning Mechanism-based Parallel mode Shadowing effects Sputtering yields Temporal evolution Ion bombardment |
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Argon Atomic force microscopy Coarsening Ion beams Ostwald ripening Silicon Sputtering Surface roughness Topography Angles of incidence Faceted structures Ion beam patterning Mechanism-based Parallel mode Shadowing effects Sputtering yields Temporal evolution Ion bombardment Basu, T Datta, D.P Som, T Transition from ripples to faceted structures under low-energy argon ion bombardment of silicon: Understanding the role of shadowing and sputtering |
| description |
10.1186/1556-276X-8-289 |
| author2 |
CENTRE FOR ADVANCED 2D MATERIALS |
| author_facet |
CENTRE FOR ADVANCED 2D MATERIALS Basu, T Datta, D.P Som, T |
| format |
Article |
| author |
Basu, T Datta, D.P Som, T |
| author_sort |
Basu, T |
| title |
Transition from ripples to faceted structures under low-energy argon ion bombardment of silicon: Understanding the role of shadowing and sputtering |
| title_short |
Transition from ripples to faceted structures under low-energy argon ion bombardment of silicon: Understanding the role of shadowing and sputtering |
| title_full |
Transition from ripples to faceted structures under low-energy argon ion bombardment of silicon: Understanding the role of shadowing and sputtering |
| title_fullStr |
Transition from ripples to faceted structures under low-energy argon ion bombardment of silicon: Understanding the role of shadowing and sputtering |
| title_full_unstemmed |
Transition from ripples to faceted structures under low-energy argon ion bombardment of silicon: Understanding the role of shadowing and sputtering |
| title_sort |
transition from ripples to faceted structures under low-energy argon ion bombardment of silicon: understanding the role of shadowing and sputtering |
| publishDate |
2020 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/183217 |
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1779152968101134336 |