Transition from ripples to faceted structures under low-energy argon ion bombardment of silicon: Understanding the role of shadowing and sputtering

Transition from ripples to faceted structures under low-energy argon ion bombardment of silicon: Understanding the role of shadowing and sputtering

10.1186/1556-276X-8-289

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Bibliographic Details
Main Authors: Basu, T, Datta, D.P, Som, T
Other Authors: CENTRE FOR ADVANCED 2D MATERIALS
Format: Article
Published: 2020
Subjects:
Argon
Atomic force microscopy
Coarsening
Ion beams
Ostwald ripening
Silicon
Sputtering
Surface roughness
Topography
Angles of incidence
Faceted structures
Ion beam patterning
Mechanism-based
Parallel mode
Shadowing effects
Sputtering yields
Temporal evolution
Ion bombardment
Online Access:https://scholarbank.nus.edu.sg/handle/10635/183217
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Institution: National University of Singapore

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https://scholarbank.nus.edu.sg/handle/10635/183217

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