Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistor
10.1021/acsanm.0c03283
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ACS Applied Nano Materials
2021
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sg-nus-scholar.10635-1875202024-05-14T02:03:01Z Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistor UTKARSH ANAND TANMAY GHOSH ZAINUL AABDIN Nandi Vrancken YAN HONGWEI XiuMei Xu Frank Holsteyns UTKUR MIRZIYODOVICH MIRSAIDOV BIOLOGICAL SCIENCES DEPT OF PHYSICS liquid-phase TEM machine learning nanofabrication nanostructures pattern collapse 10.1021/acsanm.0c03283 ACS Applied Nano Materials 2021-03-23T06:24:40Z 2021-03-23T06:24:40Z 2021-03-09 Article UTKARSH ANAND, TANMAY GHOSH, ZAINUL AABDIN, Nandi Vrancken, YAN HONGWEI, XiuMei Xu, Frank Holsteyns, UTKUR MIRZIYODOVICH MIRSAIDOV (2021-03-09). Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistor. ACS Applied Nano Materials. ScholarBank@NUS Repository. https://doi.org/10.1021/acsanm.0c03283 25740970 https://scholarbank.nus.edu.sg/handle/10635/187520 ACS Applied Nano Materials |
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liquid-phase TEM machine learning nanofabrication nanostructures pattern collapse |
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liquid-phase TEM machine learning nanofabrication nanostructures pattern collapse UTKARSH ANAND TANMAY GHOSH ZAINUL AABDIN Nandi Vrancken YAN HONGWEI XiuMei Xu Frank Holsteyns UTKUR MIRZIYODOVICH MIRSAIDOV Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistor |
| description |
10.1021/acsanm.0c03283 |
| author2 |
BIOLOGICAL SCIENCES |
| author_facet |
BIOLOGICAL SCIENCES UTKARSH ANAND TANMAY GHOSH ZAINUL AABDIN Nandi Vrancken YAN HONGWEI XiuMei Xu Frank Holsteyns UTKUR MIRZIYODOVICH MIRSAIDOV |
| format |
Article |
| author |
UTKARSH ANAND TANMAY GHOSH ZAINUL AABDIN Nandi Vrancken YAN HONGWEI XiuMei Xu Frank Holsteyns UTKUR MIRZIYODOVICH MIRSAIDOV |
| author_sort |
UTKARSH ANAND |
| title |
Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistor |
| title_short |
Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistor |
| title_full |
Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistor |
| title_fullStr |
Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistor |
| title_full_unstemmed |
Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistor |
| title_sort |
deep learning-based high throughput inspection in 3d nanofabrication and defect reversal in nanopillar arrays: implications for next generation transistor |
| publisher |
ACS Applied Nano Materials |
| publishDate |
2021 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/187520 |
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1800914777890881536 |