Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistor

• Main Authors: UTKARSH ANAND, TANMAY GHOSH, ZAINUL AABDIN, Nandi Vrancken, YAN HONGWEI, XiuMei Xu, Frank Holsteyns, UTKUR MIRZIYODOVICH MIRSAIDOV
• Other Authors: BIOLOGICAL SCIENCES
• Format: Article
• Published: ACS Applied Nano Materials 2021
• Subjects: liquid-phase TEM; machine learning; nanofabrication; nanostructures; pattern collapse
• Online Access: https://scholarbank.nus.edu.sg/handle/10635/187520
• Institution: National University of Singapore

10.1021/acsanm.0c03283