Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistor
10.1021/acsanm.0c03283
Saved in:
| Main Authors: | , , , , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
ACS Applied Nano Materials
2021
|
| Subjects: | |
| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/187520 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |