Beyond conventional secondary electron imaging using spectromicroscopy and its applications in dopant profiling

Beyond conventional secondary electron imaging using spectromicroscopy and its applications in dopant profiling

10.1016/j.mtadv.2019.100012

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Bibliographic Details
Main Authors: Han, W., Srinivasan, A., Banerjee, A., Chew, M., Khursheed, A.
Other Authors: ELECTRICAL AND COMPUTER ENGINEERING
Format: Article
Published: Elsevier Ltd 2022
Subjects:
Electron energy spectrometer
Scanning electron microscope
Semiconductor characterization
Solar cell
Online Access:https://scholarbank.nus.edu.sg/handle/10635/213260
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Institution: National University of Singapore
Description
Summary:10.1016/j.mtadv.2019.100012

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