Beyond conventional secondary electron imaging using spectromicroscopy and its applications in dopant profiling

10.1016/j.mtadv.2019.100012

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Bibliographic Details
Main Authors:	Han, W., Srinivasan, A., Banerjee, A., Chew, M., Khursheed, A.
Other Authors:	ELECTRICAL AND COMPUTER ENGINEERING
Format:	Article
Published:	Elsevier Ltd 2022
Subjects:	Electron energy spectrometer Scanning electron microscope Semiconductor characterization Solar cell
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/213260
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-2132602024-11-15T19:44:59Z Beyond conventional secondary electron imaging using spectromicroscopy and its applications in dopant profiling Han, W. Srinivasan, A. Banerjee, A. Chew, M. Khursheed, A. ELECTRICAL AND COMPUTER ENGINEERING Electron energy spectrometer Scanning electron microscope Semiconductor characterization Solar cell 10.1016/j.mtadv.2019.100012 Materials Today Advances 2 100012 2022-01-07T03:51:30Z 2022-01-07T03:51:30Z 2019 Article Han, W., Srinivasan, A., Banerjee, A., Chew, M., Khursheed, A. (2019). Beyond conventional secondary electron imaging using spectromicroscopy and its applications in dopant profiling. Materials Today Advances 2 : 100012. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mtadv.2019.100012 2590-0498 https://scholarbank.nus.edu.sg/handle/10635/213260 Attribution-NonCommercial-NoDerivatives 4.0 International https://creativecommons.org/licenses/by-nc-nd/4.0/ Elsevier Ltd Scopus OA2019
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Electron energy spectrometer Scanning electron microscope Semiconductor characterization Solar cell
spellingShingle	Electron energy spectrometer Scanning electron microscope Semiconductor characterization Solar cell Han, W. Srinivasan, A. Banerjee, A. Chew, M. Khursheed, A. Beyond conventional secondary electron imaging using spectromicroscopy and its applications in dopant profiling
description	10.1016/j.mtadv.2019.100012
author2	ELECTRICAL AND COMPUTER ENGINEERING
author_facet	ELECTRICAL AND COMPUTER ENGINEERING Han, W. Srinivasan, A. Banerjee, A. Chew, M. Khursheed, A.
format	Article
author	Han, W. Srinivasan, A. Banerjee, A. Chew, M. Khursheed, A.
author_sort	Han, W.
title	Beyond conventional secondary electron imaging using spectromicroscopy and its applications in dopant profiling
title_short	Beyond conventional secondary electron imaging using spectromicroscopy and its applications in dopant profiling
title_full	Beyond conventional secondary electron imaging using spectromicroscopy and its applications in dopant profiling
title_fullStr	Beyond conventional secondary electron imaging using spectromicroscopy and its applications in dopant profiling
title_full_unstemmed	Beyond conventional secondary electron imaging using spectromicroscopy and its applications in dopant profiling
title_sort	beyond conventional secondary electron imaging using spectromicroscopy and its applications in dopant profiling
publisher	Elsevier Ltd
publishDate	2022
url	https://scholarbank.nus.edu.sg/handle/10635/213260
_version_	1821202445047431168

Beyond conventional secondary electron imaging using spectromicroscopy and its applications in dopant profiling

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