Subwavelength-Engineered Suspended Silicon Waveguide for Long-Wave Infrared Sensing Applications

Subwavelength-Engineered Suspended Silicon Waveguide for Long-Wave Infrared Sensing Applications

10.1109/MEMS51782.2021.9375151

Saved in:
Bibliographic Details
Main Authors: Liu, W, Ma, Y, Chang, Y, Dong, B, Wei, J, Ren, Z, Lee, C
Other Authors: ELECTRICAL AND COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: IEEE 2022
Subjects:
mid-infrared
suspended Si waveguide
subwavelength grating
chemical sensor
photonic platform
Online Access:https://scholarbank.nus.edu.sg/handle/10635/215037
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
id sg-nus-scholar.10635-215037
record_format dspace
spelling sg-nus-scholar.10635-2150372024-11-15T02:26:32Z Subwavelength-Engineered Suspended Silicon Waveguide for Long-Wave Infrared Sensing Applications Liu, W Ma, Y Chang, Y Dong, B Wei, J Ren, Z Lee, C ELECTRICAL AND COMPUTER ENGINEERING Assoc Prof Chengkuo Lee mid-infrared suspended Si waveguide subwavelength grating chemical sensor photonic platform 10.1109/MEMS51782.2021.9375151 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) 2021-January 302-305 2022-02-08T09:34:58Z 2022-02-08T09:34:58Z 2021-01-25 2022-02-08T09:29:06Z Conference Paper Liu, W, Ma, Y, Chang, Y, Dong, B, Wei, J, Ren, Z, Lee, C (2021-01-25). Subwavelength-Engineered Suspended Silicon Waveguide for Long-Wave Infrared Sensing Applications. 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) 2021-January : 302-305. ScholarBank@NUS Repository. https://doi.org/10.1109/MEMS51782.2021.9375151 9781665419123 1084-6999 https://scholarbank.nus.edu.sg/handle/10635/215037 IEEE Elements
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic mid-infrared
suspended Si waveguide
subwavelength grating
chemical sensor
photonic platform
spellingShingle mid-infrared
suspended Si waveguide
subwavelength grating
chemical sensor
photonic platform
Liu, W
Ma, Y
Chang, Y
Dong, B
Wei, J
Ren, Z
Lee, C
Subwavelength-Engineered Suspended Silicon Waveguide for Long-Wave Infrared Sensing Applications
description 10.1109/MEMS51782.2021.9375151
author2 ELECTRICAL AND COMPUTER ENGINEERING
author_facet ELECTRICAL AND COMPUTER ENGINEERING
Liu, W
Ma, Y
Chang, Y
Dong, B
Wei, J
Ren, Z
Lee, C
format Conference or Workshop Item
author Liu, W
Ma, Y
Chang, Y
Dong, B
Wei, J
Ren, Z
Lee, C
author_sort Liu, W
title Subwavelength-Engineered Suspended Silicon Waveguide for Long-Wave Infrared Sensing Applications
title_short Subwavelength-Engineered Suspended Silicon Waveguide for Long-Wave Infrared Sensing Applications
title_full Subwavelength-Engineered Suspended Silicon Waveguide for Long-Wave Infrared Sensing Applications
title_fullStr Subwavelength-Engineered Suspended Silicon Waveguide for Long-Wave Infrared Sensing Applications
title_full_unstemmed Subwavelength-Engineered Suspended Silicon Waveguide for Long-Wave Infrared Sensing Applications
title_sort subwavelength-engineered suspended silicon waveguide for long-wave infrared sensing applications
publisher IEEE
publishDate 2022
url https://scholarbank.nus.edu.sg/handle/10635/215037
_version_ 1821230515085115392

Similar Items